Mgr. Jiří Vohánka, Ph.D.

Výzkumný pracovník II, Optics for Thin films and Solid surfaces

Office: pav. 07/02002
Kotlářská 267/2
611 37 Brno

Phone:	+420 549 49 3357

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Total number of publications: 50

2020

Ellipsometric characterization of highly non-uniform thin films with the shape of thickness non-uniformity modeled by polynomials

VOHÁNKA Jiří FRANTA Daniel ČERMÁK Martin HOMOLA Vojtěch BURŠÍKOVÁ Vilma OHLÍDAL Ivan

Article in Periodical

Optics Express, year: 2020, volume: 28, edition: 4, DOI
Ellipsometric characterization of inhomogeneous thin films with complicated thickness non-uniformity: application to inhomogeneous polymer-like thin films

OHLÍDAL Ivan VOHÁNKA Jiří BURŠÍKOVÁ Vilma ŠULC Václav ŠUSTEK Štěpán OHLÍDAL Miloslav

Article in Periodical

Optics Express, year: 2020, volume: 28, edition: 24, DOI
Optical quantities of a multilayer system with randomly rough boundaries and uniaxial anisotropic media calculated using the Rayleigh-Rice theory and Yeh matrix formalism

ČERMÁK Martin VOHÁNKA Jiří FRANTA Daniel OHLÍDAL Ivan

Article in Periodical

Physica Scripta, year: 2020, volume: 95, edition: 9, DOI
Spectroscopic ellipsometry of inhomogeneous thin films exhibiting thickness non-uniformity and transition layers

OHLÍDAL Ivan VOHÁNKA Jiří BURŠÍKOVÁ Vilma FRANTA Daniel ČERMÁK Martin

Article in Periodical

Optics Express, year: 2020, volume: 28, edition: 1, DOI

2019

Approximate methods for the optical characterization of inhomogeneous thin films: Applications to silicon nitride films

OHLÍDAL Ivan VOHÁNKA Jiří FRANTA Daniel ČERMÁK Martin ŽENÍŠEK Jaroslav VAŠINA Petr

Article in Periodical

Journal of Electrical Engineering, year: 2019, volume: 70, edition: 7, DOI
Approximations of reflection and transmission coefficients of inhomogeneous thin films based on multiple-beam interference model

OHLÍDAL Ivan VOHÁNKA Jiří MISTRÍK Jan ČERMÁK Martin VIŽĎA František FRANTA Daniel

Article in Periodical

Thin Solid Films, year: 2019, volume: 692, edition: 31 December 2019, DOI
Combination of spectroscopic ellipsometry and spectroscopic reflectometry with including light scattering in the optical characterization of randomly rough silicon surfaces covered by native oxide layers

OHLÍDAL Ivan VOHÁNKA Jiří ČERMÁK Martin FRANTA Daniel

Article in Periodical

Surface Topography: Metrology and Properties, year: 2019, volume: 7, edition: 4, DOI
Efficient method to calculate the optical quantities of multi-layer systems with randomly rough boundaries using the Rayleigh Rice theory

VOHÁNKA Jiří ČERMÁK Martin FRANTA Daniel OHLÍDAL Ivan

Article in Periodical

Physica Scripta, year: 2019, volume: 94, edition: 4, DOI
Evaluation of the Dawson function and its antiderivative needed for the Gaussian broadening of piecewise polynomial functions

VOHÁNKA Jiří NEČAS David FRANTA Daniel

Article in Periodical

Journal of Vacuum Science & Technology B, year: 2019, volume: 37, edition: 6, DOI
Optical characterization of inhomogeneous thin films containing transition layers using the combined method of spectroscopic ellipsometry and spectroscopic reflectometry based on multiple-beam interference model

OHLÍDAL Ivan VOHÁNKA Jiří BURŠÍKOVÁ Vilma ŽENÍŠEK Jaroslav VAŠINA Petr ČERMÁK Martin FRANTA Daniel

Article in Periodical

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics, year: 2019, volume: 37, edition: 6, DOI

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